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Overview. Product catalog. Used for the manufacturing of semiconductor devices, flat panels, photovoltaic panels and MEMS. Sulfur Hexafluoride (SF6) is more and more used for the manufacturing of semiconductor devices such as IC (integrated circuits), flat panels, photovoltaic panels and MEMS (Micro-Electro-Mechanical-Systems). SF6 is applied in the above process as an etching gas.Get price

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